化學機械研磨在深次微米半導體元件製造之應用

Full metadata record

DC Field	Value	Language
dc.contributor.author	王英郎	en_US
dc.contributor.author	馮明憲, 曾偉志	en_US
dc.date.accessioned	2014-12-12T02:18:22Z	-
dc.date.available	2014-12-12T02:18:22Z	-
dc.date.issued	1996	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#NT856430119	en_US
dc.identifier.uri	http://hdl.handle.net/11536/62554	-
dc.language.iso	en_US	en_US
dc.title	化學機械研磨在深次微米半導體元件製造之應用	zh_TW
dc.title	= Application of chemical-mechanical polishing to the fabrication of deep submicron semiconductor devices	en_US
dc.type	Thesis	en_US
dc.contributor.department	電子研究所	zh_TW
Appears in Collections:	Thesis