三電極矽電容式壓力感測器及光纖反射式測微器

Title:	三電極矽電容式壓力感測器及光纖反射式測微器 Three-Electrode Silicon Capacitive Pressure Sensor
Authors:	黃國貞 Hwang, Gwo-Jen 張國明 Chang Kow-Ming 電子研究所
Keywords:	壓力感測器;測微器;pressure sensor;displacement micrometer
Issue Date:	1997
URI:	http://140.113.39.130/cdrfb3/record/nctu/#NT860428025 http://hdl.handle.net/11536/63007
Appears in Collections:	Thesis