矽基反向串聯電感之研究

Abstract

本文主旨在提出一種反向串聯電感結構,並用來縮小射頻及類比電路中 之電感所佔面積.反向串聯電感之製造方法,採用標準IC製程.實驗結果證 實反向串聯電感之電感密度為單一電感之86%至100%.且其品質因數在100 MHz至3.5GHz間二者幾忽相同.本電感結構之特性亦可由等效模型來準確描 述. A planar spiral inductor is known to occupy a large portion of chip area due to its spiral winding in an MMIC. A large number of coil turns is usually required to obtain a high inductance value.Unfortunately, the inductance value can not be expected to be proportionalto the square of the number of coil turns, mainly due to the existence of interwinding capacitance and the planar structure. In this thesis, two series planar inductors, of which the central portion of the spiral are connected together,are oriented such that the current flows in the spiral are of opposite directions. Such connection and orintations are found to have higher inductance density, i.e. inductance per unit area, value than a pair of conventional series-connected inductors.