標題: | Characterization and Modeling of on-chip spiral inductors for Si RFICs |
作者: | Chao, CJ Wong, SC Kao, CH Chen, MJ Leu, LY Chiu, KY 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | equivalent lumped circuit;inductors;modeling;skin effect |
公開日期: | 1-二月-2002 |
摘要: | The paper presents a complete characterization of on-chip inductors fabricated in BiCMOS technology. First, a study of the scaling effect of inductance on geometry and structure parameters is presented to provide a clear guideline on inductor scaling with suitable quality factors. The substrate noise analysis and noise reduction techniques are then investigated. It is shown that floating well can improve both quality factor and noise elimination by itself under 3 GHz and together with a guard ring above 3 GHz. Finally, for accurate circuit simulations, a new inductor model is developed for predicting the skin effect and eddy effect and associated quality factor and inductance. |
URI: | http://dx.doi.org/10.1109/TSM.2002.983440 http://hdl.handle.net/11536/29043 |
ISSN: | 0894-6507 |
DOI: | 10.1109/TSM.2002.983440 |
期刊: | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING |
Volume: | 15 |
Issue: | 1 |
起始頁: | 19 |
結束頁: | 29 |
顯示於類別: | 期刊論文 |