Cu_CVD即時監控系統的製作(II)

Abstract

本論文研究之目的乃在於設計製作一套監控系統,以用於銅化學氣相 沉積系統(Cu_CVD System),讓使用者在監控電腦上就能夠對整個銅化學氣 相沉積系統進行操控. 本論文中,我們將整個監控系統設計成兩大部份. 第一部份是PC上的主監控系統;第二部份則是為以80x86為主體的子監控系 統界面模組. 主監控系統和子監控模組間分別為獨立之程式架構,兩者間 以動態資料伺服器為橋樑,來取得彼此的溝通交談. 主電腦方面,我們完成 了一個在Windows 95作業系統下的監控軟體,子監控系統方面,以80x86為 工作核心,完成一由許多附屬控制系統組合而成的製程流程架構. 我 們所製作的監控系統具有以下六個設計特點: (1)可程式化的製程程序. (2)對銅化學氣相沉積系統的操作監控. (3)以動態資料交換的方法使系統 能以圖形化方式即時動態地顯示Cu_CVD系統狀態. (4)採用模組化的監控 介面利於系統的擴充. (5)主監控流程由許多不同之附屬控制系統組合而 成,易於系統的錯誤診斷. (6)製程流程狀態資料儲存. A real time remote control system for Cu_CVD system is proposed here. This system has both the monitor and control functions so that the users can supervise a Cu_CVD system through the network. In this thesis, the whole systemis categorized into two sub-designs: the host computer and the interface controller. The host computer is designed by using Pentium personal computer,and the interface controller, designed by Mirle Automation Corporation, is anIntel 80x86 PC-based open controller with DOS kernel embedded inside. An interface communication program is also designed to link the functions of twosub-designs together. Therefore, the data and commands can be transferred between two sub-designs through DDE server in Win95 operation system. In the host computer, we have designed a friendly monitor and control program operatedunder Win95 operation system. In the interface controller, the primary controlprograms for the whole Cu_CVD system have been designed and tested in ourlaboratory. Six special designs have been proposed in this thesis: (1)user programmableprocess of the Cu_CVD system, (2)remote control and monitor of the Cu_CVD system, (3)dynamically display the current status of the whole system is boththe text output and graphic output, (4)modeling program as the design style in the interface controller for easy expansion in the future, (5)sub-functionstructure as the design style in the host computer for easy debugging in thedesign and test phased, (6)the storage of monitor data for revising the system process.