自動化Cu-CVD監控系統的製作

Abstract

本論文研究之目的乃在於設計製作一套自動化監控系統，以用於銅化學氣相沈積系統( Cu-CVD System )，讓使用者在監控電腦上就能對整個銅化學氣相沈積系統進行操控。本論文中，我們將整個監控系統設計成兩大部份。第一部份是PC上的主監控系統；第二部份則是為以80x86 CPU為核心的模組化子監控系統。主監控系統和子監控系統間為分工合作之程式架構，兩者間以動態資料伺服器為橋樑，來取得彼此的溝通交談。在主電腦方面，我們完成了一個在Windows 95作業系統下可程序規畫的監控軟體；子監控系統方面，以80x86 CPU為工作核心，完成一由許多附屬控制系統組合而成的製程流程架構。而應用此方式所設計的自動化監控系統目前也已經實際運作，監控此Cu-CVD系統的製程。 我們所製作的監控系統具有以下六個設計的特點：（1） 可程式化的製程程序。（2） 對銅化學氣相沈積系統的圖形監控操作。（3） 以動態資料交換的方法使系統能以圖形化方式即時動態地顯示Cu-CVD系統的狀態。（4） 採用模組化的監控介面利於系統的擴充。（5）子監控系統之流程架構由不同之附屬控制系統組合而成，易於系統的錯誤診斷。（6）具備遠端監控的能力。

An automatic remote control system for Cu_CVD system is proposed here. This system has both the monitor and control functions so that the users can supervise a Cu_CVD system through the network. In this thesis, the whole system is categorized to two subdesigns: the host computer and the interface controller. The host computer is designed by using Pentium personal computer. The interface controller, designed by Mirle Automation Corporation, is an Intel 80x86 PC-based open controller with DOS kernel embedded inside. An interface communication program is also designed to link the functions of two subdesigns together. Therefore, the data and commands can be transferred between two subdesigns through DDE server in Win95 operation system. In the host computer, we have designed a friendly monitor and control programs operated under Win95 operation system. Six special designs have been proposed in this thesis: (1) user programmable proc-ess of the Cu_CVD system , (2) remote control and monitor of the Cu_CVD system, (3) dynamically display the current status of the whole system is both the text output and graphic output , (4)modeling program as the design style in the interface controller for easy expansion in the future, (5) sub-function structure as the design style in the host computer for easy debugging in the design and test phases, (6) the monitoring and con-trolling through the network. The whole system has been finished and works very well in the National Nano Device Laboratories (NDL).