利用多波長及多入射角技術量測白金薄膜的光學參數

Abstract

以PSA橢圓儀測量白金(Pt)樣本的橢圓參數(φ,Δ),在多入射角的情況下以繪圖及逐漸放大方式判斷厚度、折射率(N)及吸收率(K)，發現當厚度增加時折射率與吸收率皆減少，此結果經實驗證實亦適用於其它波長。

A PSA ellipsometer is used to measure the ellipsometric parameters (ψ and △) of Platinum films. Using the ψ-△ curve and zoom-in technique, we determined the film thickness and their complex refractive indices by different incident anges.ln result, we find that the refractive index decreases as the film thickness increasee for both waelengths (0.5435 and 0.6328um). This thickness dependent effect is the major contribution of this work and worth futher research.