鉻鋁氧類及氮化矽類嵌附式減光型相移圖罩之研製與模擬

標題:	鉻鋁氧類及氮化矽類嵌附式減光型相移圖罩之研製與模擬 Fabrication and Simulation of CrAlxOy and SiNx as Embedded Materials for Embedded Attenuated Phase Shift Mask
作者:	張克文 Chang, Keh-Wen 龍文安 Loong, Wen-An 應用化學系碩博士班
關鍵字:	鉻鋁氧;氮化矽
公開日期:	1997
URI:	http://140.113.39.130/cdrfb3/record/nctu/#NT863500018 http://hdl.handle.net/11536/63555
Appears in Collections:	Thesis