鉻鋁氧類及氮化矽類嵌附式減光型相移圖罩之研製與模擬

Full metadata record

DC Field	Value	Language
dc.contributor.author	張克文	en_US
dc.contributor.author	Chang, Keh-Wen	en_US
dc.contributor.author	龍文安	en_US
dc.contributor.author	Loong, Wen-An	en_US
dc.date.accessioned	2014-12-12T02:19:40Z	-
dc.date.available	2014-12-12T02:19:40Z	-
dc.date.issued	1997	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#NT863500018	en_US
dc.identifier.uri	http://hdl.handle.net/11536/63555	-
dc.language.iso	zh_TW	en_US
dc.subject	鉻鋁氧	zh_TW
dc.subject	氮化矽	zh_TW
dc.title	鉻鋁氧類及氮化矽類嵌附式減光型相移圖罩之研製與模擬	zh_TW
dc.title	Fabrication and Simulation of CrAlxOy and SiNx as Embedded Materials for Embedded Attenuated Phase Shift Mask	en_US
dc.type	Thesis	en_US
dc.contributor.department	應用化學系碩博士班	zh_TW
Appears in Collections:	Thesis