標題: Fabrication、Analysis and Research of Three-layer Polysilicon Thermal Microactuators and Micro Sliding System
作者: 余志誠
Yu, Zhi-Cheng
邱俊誠
Qiu, Zun-Cheng
電控工程研究所
關鍵字: 電熱式微致動器;微滑桿致動系統;位置控制;電機工程;控制工程;Thermal Microactuators;Micro Sliding System;Position Control;ELECTRICAL-ENGINEERING;CONTROL-ENGINEERING
公開日期: 1997
摘要: This research describes a MEMS sliding device that can be used for position control of optical devices. This MEMS device consists of actuator, sensor and linear sliding block that are fabricated by using the Multi-User MEMS Processes(MUMPs). Firstly, by using MEMSprocess simulation software, Intellicad, we could analyze the givenfabrication process so that the designed MEMS device canbe successfully manufacture. Secondly, by adapting ANSYS finite element analysissoftware, we are able to analyze the dynamic characteristic of the designed actuator driven by electrical voltage and heat. A build-in sensor based on variable capacitance is also developed to measure the displacement of the traveling slider. Finally, a PC-based feedback control design, which consistsof I/O interface, actuating and sensing circuits, is developed and tried to achieve the goal: position control of a MEMS sliding device.
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT864591004
http://hdl.handle.net/11536/63650
Appears in Collections:Thesis