Fabrication、Analysis and Research of Three-layer Polysilicon Thermal Microactuators and Micro Sliding System

Abstract

This research describes a MEMS sliding device that can be used for position control of optical devices. This MEMS device consists of actuator, sensor and linear sliding block that are fabricated by using the Multi-User MEMS Processes(MUMPs). Firstly, by using MEMSprocess simulation software, Intellicad, we could analyze the givenfabrication process so that the designed MEMS device canbe successfully manufacture. Secondly, by adapting ANSYS finite element analysissoftware, we are able to analyze the dynamic characteristic of the designed actuator driven by electrical voltage and heat. A build-in sensor based on variable capacitance is also developed to measure the displacement of the traveling slider. Finally, a PC-based feedback control design, which consistsof I/O interface, actuating and sensing circuits, is developed and tried to achieve the goal: position control of a MEMS sliding device.