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dc.contributor.authorChiou, Chie-Wunen_US
dc.contributor.authorWu, Muh-Cherngen_US
dc.date.accessioned2014-12-08T15:08:22Z-
dc.date.available2014-12-08T15:08:22Z-
dc.date.issued2009-11-01en_US
dc.identifier.issn0957-4174en_US
dc.identifier.urihttp://dx.doi.org/10.1016/j.eswa.2009.03.064en_US
dc.identifier.urihttp://hdl.handle.net/11536/6486-
dc.description.abstractThis paper presents a scheduling algorithm for an in-line stepper in low-yield scenarios, which mostly appear in cases when new process/production is introduced. An in-line stepper is a bottleneck machine in a semiconductor fab. Its interior comprises a sequence of chambers, while its exterior is a dock equipped with several ports. The transportation unit for entry of each port is a job (a group of wafers), while that for each chamber is a piece of wafer. This transportation incompatibility may lead to a capacity-loss, in particular in low-yield scenarios. Such a capacity-loss could be alleviated by effective scheduling. The proposed scheduling algorithm, called GA-Tabu, is a combination of a genetic algorithm (GA) and a tabu search technique. Numerical experiments indicate that the GA-Tabu algorithm outperforms seven benchmark ones. In particular, the GA-Tabu algorithm outperforms a prior GA both in solution quality and computation efforts. (C) 2009 Elsevier Ltd. All rights reserved.en_US
dc.language.isoen_USen_US
dc.subjectSchedulingen_US
dc.subjectSemiconductoren_US
dc.subjectFlow shopen_US
dc.subjectPort capacity constraintsen_US
dc.subjectMeta-heuristic algorithmen_US
dc.subjectGenetic algorithmen_US
dc.subjectTabu searchen_US
dc.titleA GA-Tabu algorithm for scheduling in-line steppers in low-yield scenariosen_US
dc.typeArticleen_US
dc.identifier.doi10.1016/j.eswa.2009.03.064en_US
dc.identifier.journalEXPERT SYSTEMS WITH APPLICATIONSen_US
dc.citation.volume36en_US
dc.citation.issue9en_US
dc.citation.spage11925en_US
dc.citation.epage11933en_US
dc.contributor.department工業工程與管理學系zh_TW
dc.contributor.departmentDepartment of Industrial Engineering and Managementen_US
dc.identifier.wosnumberWOS:000268270600058-
dc.citation.woscount2-
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