標題: | Temperature Sensing by Using Film Bulk Acoustic Resonator at 2.4 GHz Band |
作者: | Kao, Yao-Huang Lin, Jon-Hong 電信工程研究所 Institute of Communications Engineering |
公開日期: | 1-十一月-2009 |
摘要: | A four-layered film bulk acoustic resonator (FBAR) with an Al/AlN/SiN/Au composite structure was fabricated The FBAR is composed of a surface micromachined cantilever whose copper scarification layer is released by wet etching. A temperature coefficient (TC) of resonant frequency of -34 5 ppm/degrees C in the temperature range from 10 to 80 degrees C at 2 4 GHz is obtained. Using this resonator, an oscillator for temperature sensing was constructed, in which temperature can be detected easily by measuring the shift in oscillation frequency The TC of the oscillator is almost the same as that of the resonator. (C) 2009 The Japan Society of Applied Physics |
URI: | http://dx.doi.org/10.1143/JJAP.48.115501 http://hdl.handle.net/11536/6530 |
ISSN: | 0021-4922 |
DOI: | 10.1143/JJAP.48.115501 |
期刊: | JAPANESE JOURNAL OF APPLIED PHYSICS |
Volume: | 48 |
Issue: | 11 |
結束頁: | |
顯示於類別: | 期刊論文 |