雙層板結構加熱不同區域研究

Abstract

本論文研究目的在設計一固定邊界條件，僅利用加熱不同區域的方式就能達成雙向變形的致動器。設計的結構包括不同尺寸的薄膜與樑結構。 為仔細探討加熱不同區域時，加熱面積比例與雙層板兩層結構之厚度比對結構變形的影響，將利用有限元素軟體ANSYS 5.5來分析這些效應，並設計實驗與分析的結果作比較。為了容易比較實驗與模擬的結果，在測試結構上將設計一可量測溫度的裝置。 溫度量測裝置經過測試後，發現其電阻變化約為0.0015/℃，並進一步量測電阻變化而得到雙層板薄膜上的溫度分佈。在我們設計之下，加熱中心區域時，中心區域與外圍區域會有比較大的溫度差；在加熱外圍區域時，中心區域溫度與外圍區域溫度並沒有太大的差別。

Two-way deflecting bimorph structures are designed with fixed boundary condition and different heating regions. Different structures, beams and membranes, are designed, fabricated and tested. Effects due to heating area ratio and thickness ratio on the maximum deflection of bimorph structures are studied by simulations and experiments. Several models are simulated by a FEM program, ANSYS 5.5. In experimental, an in-situ temperature measurement technique is designed on testing structures. The results of simulations and experiments will be compared with each other. Initial curvature effect on two-way deflecting will be studied experimentally. The in-situ temperature measurement design has been proved working. The Pt sensing elements are varied with temperature, and the variation of Pt coil is about 0.0015/℃. The temperature distributions on bimorph structures are found by this design.