電磁式薄膜微致動器

Abstract

本論文研究之目的在探討電磁式薄膜微致動器。這個電磁式薄膜微致動器的原理是將一個釤鈷磁鐵黏於一個SU-8的薄膜上，利用線圈所產生的磁場來使SU-8薄膜變形。而以SU-8為材料的薄膜並未在相關的文獻上出現。電磁式薄膜微致動器的電磁場分佈、電磁力與薄膜的機械性質將利用理論與有限元素法來分析與探討。 在製造方面，線圈部分是利用UV-LIGA的技術來製造。因為利用UV-LIGA技術可以製造出高深寬比的銅線圈。而高深寬比的銅線圈電阻值較小，所以可以減少功率的浪費。而SU-8薄膜以體型微機械加工製造。最後將銅線圈與SU-8薄膜黏在一起完成電磁式薄膜微致動器。

The magnetic membrane microactuators are designed, fabricated and tested here. The design concept is to bond a Sm-Co permanent magnet to a movable SU-8 membrane which has not been used as membrane material in magnetic actuator before. Then the modeling and finite element analysis are used to find the magnetic field and membrane mechanical behaviors. The planar coils fabricated by surface micromachining have high resistance and power consumption. To reduce the power consumption, the high-aspect-ratio microcoils are required. Thus, the UV-LIGA processes are developed to fabricate the high-aspect-ratio microcoils. Then SU-8 membranes are fabricated by standard bulk micromachining techniques. Finally, the parts of planar coils and parts of SU-8 membranes are glued to form the magnetic microactuators.