使用SU-8與電鍍技術設計製作靜電式微馬達動力輸出結構

Abstract

本論文之主要目的在於利用UV-LIGA製程與電鍍技術為基礎，並以凸起式側向型微馬達作基本架構，對靜電式微馬達的轉子幾何結構作一特殊設計，使其扭矩能有效的輸出，達到應用的目的。 本論文的重點分為兩部分。首先是推導電容式微馬達的動態模型與設計其幾何形狀。當結構尺寸微型化後，對於力量輸出的影響因素與巨觀尺寸便有明顯的不同。因此對於微結構下的模型推導與幾何外型的設計考量便顯得相對重要。其次是對於UV-LIGA製程的設計考量與電鍍技術的改進。UV-LIGA製程的特性是利用紫外光與厚膜光阻以IC製程達到LIGA的效果，所以整個流程設計都必須做適當的規劃，以防止對IC製程設備的污染，並須考量接下來的電鍍製程，使UV-LIGA與電鍍製程能有效的結合，避免不相容的問題發生。 本實驗使用多次塗佈技術製作模具，光阻部分採用SU-8厚膜光阻。再使用電鍍製程做出所需結構。微馬達尺寸設計上轉子最小內徑與外徑分別為285μm與735μm，最大內外徑為1485與2615μm，厚度為60μm。軸尺寸有40μm與80μm兩種半徑，間隙均為15μm。

The purpose of this research is to use the UV-LIGA fabrication and electroplate technology, which were already developed by our laboratory as the basis, and use the electrostatic micro motor as the framework to make a special design of the rotor geometry structure of the electrostatic micro motor to make an effective output and reach the effect of application. This research is based on two parts. First, we will derive the dynamic model and design the geometry shape of the variable-capacitance micro motor. Since the scale of the device is diminished, it has an evident difference with the large scale in the presentation of mechanical behaviors and characteristics. The derivation of the dynamic model and the design of the geometric shape is therefore much importation. Second, in respect to the layout of the UV-LIGA fabrication process and improve of the electroplate technology. The characteristic of UV-LIGA process is to use the uv-light and thick photo-resistance to achieve the effect of LIGA. So the whole processing design must be considered reasonably to prevent IC fabrication equipments from contamination. And must consider that the next fabrication of electroplate should make the process of UV-LIGA and electroplate connect effectively and avoid the problem of incompatible. In this experiment, the multi coating technology was used to make the pattern, and electroplate was applied to the structure. The minimum dimensions of micro motor's inside and outside radiuses are 285μm and 735μm, and the maximum dimensions are 1485 and 2615μm. And the thickness is 60μm. There are two different radiuses in the axis's dimensions, 40μm and 80μm, and the gape is 15μm.