晶圓廠機台動態調整機制

Abstract

在現今的晶圓代工廠中，機台均具有多功能性，可藉由調整機台的加工作業參數，更改其作業內容，進而增加瓶頸機台群的產能，此系統的總產出增加。此類問題，不採用投料與派工的方式，而是利用機台的動態調整來解決。 因此，針對這樣的問題，本研究提出「機台動態調整機制」，以最大化瓶頸機台群之產量為目標，並滿足「高機台利用率之機台群，其產出量不小於未調整機台前之產量」的限制，進而得到最佳的調機方案。本研究亦修正了林氏所提的方法，以適用於多瓶頸的生產狀況。 本研究所提出的機制，主要是針對瓶頸機台群尋找可支援的替代機台群，以增加瓶頸機台群的產出。所謂的替代機台群是指可以藉由調整機台參數，使其可執行瓶頸機台群之部分加工作業。從產能狀況、支援能力、及調整機台前所需的設置時間等三項因素，來考量各替代機台的替代能力，並利用模擬方法求得新機台組合的產出。最後，以一實例來說明並驗證之。

In recent IC Foundries, the most of machine functions are multifunctional; that is, they can be reset up in order to maximize the throughput(moves) of the bottleneck machine group. This is known as the dynamic capacity adjustment problem. Thus, based on this problem, an algorithm is proposed in the research. The aim of this algorithm is to maximize the throughput of the bottleneck machine group; at the same time, it is important to keep non-decreasing the local throughput of some other machine groups with high degree of utilization. The algorithm proposed in this research is based on searching alternative machines if it ca be reset up and becomes a member in the bottleneck machine group. By evaluating some criteria of alternative machines in order to determine the priority of these alternative machines, and the alternative machine group with the highest priority will be changed to become one of the bottleneck machine group. Then, the expected throughput of the new machine mix configuration is calculated through simulation for the justification of the capacity adjustment plan. Finally, this algorithm has been implemented and verified whether the result is the best or not.