以微機電技術製造應用於腦電波量測之針狀乾式電極

Abstract

本論文研究以微機電技術應用於腦電波感測之針狀乾式電極元件的製造。利用微機電製程技術製作之針狀乾式電極經過實際上的人體測試，已證實相較於一般市售的傳統腦波量測電極有更好的效能與使用便利性，且具有體積較小，不必使用導電膠，無不舒適感的優點。針狀乾式電極上佈有一20×20之微探針陣列，當施加於皮膚上時，能夠穿過角質層進入表皮層，因此有較低電極－皮膚介面阻抗，使得所量測到的腦波訊號更強。對於後級的訊號處理辨識而言，較強的訊號可以讓放大濾波電路的設計更為簡單。相關實驗驗證包括定性定量的測試與實際的腦電波量測結果也在本論文中介紹與討論。

In this thesis, the fabrication and characterization of MEMS based silicon micro probe array, namely spiked dry electrodes, are explored for EEG measurement applications. A series of practical in-vivo tests have showed that the MEMS based spiked dry electrodes have more advantages and conveniences than the conventional standard electrodes. Compared with standard electrodes, the device area of the spiked dry electrodes is smaller. In addition, the spiked dry electrodes can be used without electrolytic gel, and they will not cause an uncomfortable feeling for the tested person. There is a 20×20 micro probe array fabricated using MEMS technology on the spiked dry electrode. When spiked dry electrode is applied to the skin, the probes can pierce the stratum corneum (SC) into the stratum germinativum (SG); thus, low skin-electrode-interface impedance effect can be obtained, stronger signal intensity can be collected. This makes the design of the amplifier circuit simpler and easier. Related experiments including qualitative/quantitative tests and practical EEG measurements are also introduced and discussed in this thesis.