标题: | 结合光纤插孔、固态浸没式透镜与精密电镀微孔之光学头研究 Development of optical head combined with micro aperture, solid immersion lens, and optical fiber socket |
作者: | 周学良 徐文祥 机械工程学系 |
关键字: | 近场光学;固态浸没式透镜;精密电镀微孔;热回火;near-field optics;solid immersion lens;electroplating aperture;thermal reflow |
公开日期: | 2001 |
摘要: | 本论文之研究目的在探讨整合性近场光学读取头之制程,将光纤插孔、固态浸没式透镜与次微米级微孔整合,改善光学读取头各元件间的整合制程,利用微影技术将各元件依序叠合加工,毋须个别制作再进行复杂且困难的结合步骤,大大简化制作流程。 在制造方面,微孔是采用一种改进式的精密电镀加工,利用电镀增生原理解决蚀刻加工法之不可回复性,藉由金属材料的电镀补偿使孔径进一步的缩小,免于受到光学曝光系统线宽与蚀刻技术的限制。此外,利用热回火原理使原始定义区之陡峭直立圆孔变形成角锥状圆孔,然后将底下牺牲层作轻微的侧向过蚀,则开孔自然成形,省略蚀刻加工时对时间与蚀刻液严格的控管程序,再以上述电镀加工即可制得次微米级孔径;微透镜部分也是利用热回火原理,将AZP 4620正光阻置于热板升温至略高于其玻璃转换温度,此时表面能会趋向最小能量,接触角因而改变,外形自然形成圆滑曲面,此法比一般蚀刻加工容易制得光滑表面。本论文提出之透镜直径范围在50至110 微米;因热回火时间增加使材料组成更为致密,透镜折射率范围介于1.63至1.82。光纤插孔则用厚膜光阻SU-8制成,并可增加元件之结构强度。 The research describes the fabrication processes of an integrated optical pick-up head for near field recording that combines a tiny aperture, a smooth microlens, and a insertion socket for optical fiber. Conventionally, micro apertures and microlenses in optical pick-up head are fabricated separately, and then are assembled together. Here a fabrication process without bonding to combine all the desired components on a single substrate is proposed. The cone-shape aperture is fabricated by reflow and an improved electroplating method. Then a thermal reflow process is used to form the smooth microlens made of AZP 4620 with the refractive index from 1.63 to 1.82. The diameter ranges from 50 μm to 110μm. After that, SU-8 support is fabricated to act as the insertion socket of the optical fiber and to enforce the device strength. |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT900489092 http://hdl.handle.net/11536/69214 |
显示于类别: | Thesis |