活性碳流體化床處理半導體廠有機溶劑製程排氣之研究

Abstract

半導體廠VOCs(Volatile Organic Compounds)排氣大風量、低濃度與組成成份複雜的特性，造成處理技術在應用上的困難，本計畫在實際運轉的半導體廠中設置活性碳流體化床的系統來處理VOCs排氣，利用化學分析的方法，了解VOCs 排氣成份對活性碳吸附材與吸附機制的影響，並從實際的操作、測試與調整的過程中，研究活性碳流體化床的技術應用在處理半導體廠VOCs排氣時，所發生的問題與可能的解決方法，最後並驗證活性碳流體化床的技術實際應用在處理半導體廠VOCs排氣的結果，能否符合初設時所預期的目標。

A Research of VOCs Exhaust Treatment in Semiconductor Fab by Beads-shaped Activated Carbon Fluidized Bed Student：Shiao-Lin Chiang Advisor：Wu-Shung Fu Master Degreeof Industry Safety and Risk Management National Chiao Tung University Abstract Owing to the characteristics of large volume、low concentration and complicated compositions，there exists challenges for abatement technology to be applied on semiconductor Fab VOCs exhaust treatment。A Beads-shaped Activated Carbon Fluidized Bed System is set up to treat VOCs exhaust in an operational semiconductor Fab。Chemical analysis method is utilized to help verify the impact to activated carbon adsorbent and absorption mechanism by VOCs compositions。After test run、operation、parameter adjustment and certification，technical problems appeared and available solutions were evaluated。Finally the application of Beads-shaped Activated Carbon Fluidized Bed System on VOCs exhaust treatment in semiconductor Fab is verified if complying the target when this system was initially set up。