標題: | Effect of Controlled Growth Dynamics on the Microstructure of Nonpolar a-Plane GaN Revealed by X-ray Diffraction |
作者: | Sun, Qian Ko, Tsung-Shine Yerino, Christopher D. Zhang, Yu Lee, In-Hwan Han, Jung Lu, Tien-Chang Kuo, Hao-Chung Wang, Shing-Chung 光電工程學系 Department of Photonics |
公開日期: | 1-七月-2009 |
摘要: | This paper reports the effect of controlled growth dynamics, as monitored by in situ optical reflectance, on the microstructure of nonpolar a-plane GaN films grown on r-plane sapphire. The mosaic microstructure of a-plane GaN and its anisotropy are evaluated by X-ray rocking curve (XRC) measurements. By inserting a pronounced islanding stage followed by an enhanced lateral growth, pit-free a-plane GaN has been achieved showing an XRC linewidth of similar to 0.18 and similar to 0.3 degrees for on- and off-axes planes, respectively, with only minor anisotropy. The density of basal-plane stacking faults is reduced by similar to 70% as determined by a modified Williamson-Hall X-ray analysis. (C) 2009 The Japan Society of Applied Physics DOI: 10.1143/JJAP.48.071002 |
URI: | http://dx.doi.org/10.1143/JJAP.48.071002 http://hdl.handle.net/11536/7011 |
ISSN: | 0021-4922 |
DOI: | 10.1143/JJAP.48.071002 |
期刊: | JAPANESE JOURNAL OF APPLIED PHYSICS |
Volume: | 48 |
Issue: | 7 |
結束頁: | |
顯示於類別: | 期刊論文 |