壓電微致動器之研究

Abstract

本文主要是研究壓電微致動器的設計與製作。經過基礎文獻與專利的分析以及比較各類微致動器工作原理與優缺點後，選擇壓電微致動器作為研究方向，並選定Tani等人所設計之壓電微馬達中的壓電微致動部份，作為本微致動器研究之構想設計的基礎，進行尺寸、材料與製程等三方面的分析與實作，以期建立微致動器之理論分析與實作的流程。 本研究的微致動器尺寸約為先前技藝的兩倍。在製程方面，所有零件皆採微機電技術製造，元件的材料方面，則改採用負光阻SU-8。 為了了解壓電微致動器及壓電片之動態及靜態特性，同時利用有限元素法，進行相關元件變形的模擬分析，並以最佳化法則，進行壓電微致動器之外型尺寸參數的訂定，最後進行壓電微致動器之測試及壓電片之實驗，並予模擬分析結果比對。

This study focuses on the design and fabrication of the microactuator. After comparing many kinds of microactuators, the piezoelectric microactuator is chosen to be a research direction. The mechanism of the piezoelectric microactuator of the piezoelectric micromotor, which Tani, et al. developed, is picked to be the base design of this study. The research endeavors to the characteristic analysis of the dimension and material of the piezoelectric microactuator, and put in practice. It can be expectable that the effective process combined with theoretical analysis and fabrication practice would be built. The dimension of the design is twice as big as the original design. All components of the design are fabricated by micro electro mechanical system (MEMS) technology. The mechanical components of the design are made from SU-8 that is an epoxy based negative resists. For understanding static and dynamic characteristics of the piezoelectric microactuator and the piezoelectric film, the finite element method has been to simulate the deformation of the components with piezoelectric effect. Then the geometry of the piezoelectric microactuator is optimized. Finally, the testing of the piezoelectric microactuator and the experiment of the piezoelectric film is given, and the results of experiment are compared with analyses’ results.