標題: | Homogeneous Nucleation of Epitaxial CoSi(2) and NiSi in Si Nanowires |
作者: | Chou, Yi-Chia Wu, Wen-Wei Chen, Lih-Juann Tu, King-Ning 材料科學與工程學系 Department of Materials Science and Engineering |
公開日期: | 1-六月-2009 |
摘要: | Homogeneous nucleation is rare except in theory. We observed repeating events of homogeneous nucleation in epitaxial growth of CoSi(2) and NiSi silicides in nanowires of silicon by using high resolution TEM. The growth of every single atomic layer requires nucleation. Heterogeneous nucleation is prevented because of non-microreversibility between the oxide/Si and oxide/silicide interfaces. We determined the incubation time of homogeneous nucleation. The calculated and the measured nucleation rates are in good agreement. We used Zeldovich factor to estimate the number of molecules in the critical nucleus; it is about 10 and reasonable. A very high supersaturation is found for the homogeneous nucleation. |
URI: | http://dx.doi.org/10.1021/nl900779j http://hdl.handle.net/11536/7130 |
ISSN: | 1530-6984 |
DOI: | 10.1021/nl900779j |
期刊: | NANO LETTERS |
Volume: | 9 |
Issue: | 6 |
起始頁: | 2337 |
結束頁: | 2342 |
顯示於類別: | 期刊論文 |