半導體製程設備拆移機風險管理研究

Abstract

由於半導體製造技術提昇迅速，國內晶圓廠必須藉由拆移機作業來調整產能及提昇製程技術。半導體設備在製程過程中多使用了高危險之化學品，因此設備管路在拆移除的過程中，隱含了高度的工安環保及財務損失的風險。本研究旨在對拆移機作業中的高風險行為，提出預防、保護、抑制、緊急應變及災後復原措施。從國內外拆移機文獻資料與事故統計探討，本研究以人員安全事故頻率最高的薄膜製程設備，以及意外事故頻率最高的濕式清洗台設備為研究對象。藉由風險分析及對半導體產業具有拆移機經驗的專家之意見問卷調查發現，在這兩個設備中，以拆除氣體和化學品管路分歧盤箱，及拆除氣體和化學品供應端管路是最高風險的作業。拆除氣體和化學品管路分歧盤箱作業中，以上鎖/掛牌執行不確實造成人員誤開而洩漏，不慎吸入氮氣造成吸入性休克，及不當使用或未穿著個人防護具使人員暴露於化學物質而受傷或造成意外事故，為高風險性的行為。在拆除氣體和化學品供應端管路作業中，以管路內氣體和化學品洩漏造成人員受傷、疏散或設備受損，拆錯管路或關錯閥件造成人員受傷或其他機台停機或損失，及管路內殘餘液體未清除致拆除人員眼睛或皮膚濺到，為大家所認為是最具有高風險性的行為。於拆移機作業時，除了符合相關法令規定外，應確實掌握拆移機之風險，進而管理風險，預防意外事故發生，而當不幸發生拆移機災害時能緊急應對，從而降低對人員安全健康、環境衝擊、生產中斷之影響。

With the fast growth of semiconductor production technologies, semiconductor companies in Taiwan have to decommission their tools to adjust production capacities and meet technology development requirements. Semiconductor tools equipped with hazardous materials and energy may present high risks to environment, safety, health and property. This study was aimed to provide risk management protocols for prevention, protection, mitigation, emergency response and disaster recovery for the tools decommissioning. Literatures regarding tools decommissioning, including related organizations and semiconductor companies’ procedures, were reviewed. CVD process tools were found to have the highest personnel injury potential and wet benches had the highest property damage potential. A questionnaire was sent to the experts of semiconductor companies to prioritize risk rankings of decommissioning steps for CVD tools and wet benches. It was found that the disconnection of gas/chemical pipelines and valve manifold boxes were the highest risk operations. Accidents were usually attributed to incorrect lock out / tag out procedures, mistaken disconnection of valves, inhalation of excess nitrogen, and improper use of personal protective equipment. Gas/chemical pipelines disconnection incidents resultant in chemical leakage may cause personnel injury, fab evacuation or property damage. While mistaken disconnection of pipes and valves could leave pipeline residues splashing to skin or eyes were considered as the action with medium-high risks. The risk management model for tools decommissioning is expected to improve understanding of decommissioning process and prevents the accidents. If the accident occurs, the proper protection and emergency response measures can reduce the impact to personnel safety and health, environmental protection and production continuity.