利用原子力顯微鏡操控奈米粒子之定位控制

Abstract

為了機電元件的微小化與生化方面的應用，奈米科技技術運用的重要性也隨著與日俱增。但也由於目前的奈米技術還尚未發展成熟，因此利用奈米操控術來組成奈米級之機電元件與生化DNA重組是很重要的研究主題。本研究採用針對模型之不確定性及外界干擾有強健性的順滑模態控制去控制平台，利用閉迴路X-Y精密平台的應變計回饋訊號使探針能準確的推動於傾斜面上的奈米粒子。為了補償可能發生的探針與奈米粒子失去接觸，本研究擷取原子力顯微鏡中探針懸臂樑撓曲時，雷射光呈現於四象儀光偵測器的回授電壓訊號，然後使用模糊控制器對此訊號作X-Y平台的定位控制，建立一個穩定和高精度的粒子推動系統。根據實驗獲得下列三項結果：一、斜面上奈米粒子的推動；二、斜面坡度改變後探針掃瞄的範圍限制；三、斜面上奈米粒子的移除與保留。

To develop nanotechnology, nanoparticle manipulation plays an important role in the assembly of nanoelements. This study aims to manipulate nanoparticles using an atomic force microscope and an XY positioning stage. Strain gauges serve as sensors to measure the travel distance of piezo-drivers in an X-Y stage in an atomic force microscopy system. Nanoparticles are pushed based on sliding mode control whose robust properties can deal with model uncertainty and disturbance. In addition, a fuzzy controller is responsible for compensating “tip-particle contact loss”, so as to establish an accurate and stable manipulation system. Experimental results demonstrate pushing nanoparticles on inclined substrates, different limited scanning ranges with different slope angles, and removing and remaining nanoparticles on inclined substrates.