用於主動式矩陣產品陣列測試技術之開發程序

Abstract

主動式矩陣產品的面積越來越大，但許多應用產品矩陣檢測方式依然是在組成產品時，才做功能性測試。如此一來，我們不僅喪失在前段大基板的良率改善契機，也往往造成許多後段製程材料的浪費。 目前主動式矩陣的前段測試僅在薄膜電晶體液晶面板是較為成熟的，其餘皆有改善的空間。本篇論文重新檢視薄膜電晶體液晶面板的檢測原理，並將其歸納衍生到其他新型主動式矩陣的產品檢測，例如有機發光二極體， 平板偵測器，觸控面板等等。 藉由探討許多電路的檢測，總結出主動式矩陣產品用於測試陣列的通用開發程序。基於此程序，若有衍生性甚至嶄新的主動式矩陣產品進入量產化階段，都能透過所提出的開發程序，來初步定義並建立需偵測的缺陷型態以及可能的缺陷漏篩，甚至開發新的檢測的流程或手法。

The area of active matrix (AM)_products keeps growing, but in many cases, the matrix is not tested until the functions are complete after the compositions of the products are finished. In this way, not only the opportunity for improvement in the yield of the preceding substrate is missed but also many back end of line (BEOL) materials are wasted. For now, as the front end tests as concerned, only those for the thin film transistor liquid crystal display (TFT LCD) panels are relatively mature. The defect detection methods for the other types of AM products have much room for improvement. This thesis reexamines the detection principles for the TFT LCD panels, and further derives variety of testing methods for other new AM products, such as AM-organic light emitting diode, AM-flat panel detector, AM-touch panel. By the discussion of the detection for many circuits, we summarize a general developing procedure to test the array for various kinds of AM products. With the proposed procedure, if there are derivative or even novel AM products entering the mass production phase, the defect types and possible cases of miss-pass can be developed primitively in no time. Moreover, new detection processes or techniques can be developed quickly.