標題: | High oriented ZnO films by sol-gel and chemical bath deposition combination method |
作者: | Cheng, Hua-Chi Chen, Chia-Fu Tsay, Chien-Yie Leu, Jih-Perng 材料科學與工程學系 Department of Materials Science and Engineering |
關鍵字: | ZnO;Thin films;Crystal growth;Crystal structure |
公開日期: | 5-May-2009 |
摘要: | Poly-crystalline ZnO films with high oriented columnar grains were deposited on ZnO-coated seed layers by chemical bath deposition (CBD) in an aqueous-solution bath containing zinc nitrate [Zn(NO(3))(2)center dot 6H(2)O], and dimethylamineborane (DMAB) at 60 degrees C without pre-activation especially. Sol-gel ZnO films on glass substrates were used as the seed layers which the mean size of the crystals in seed layer increased from several to approximately 80nm at temperature from 150 degrees C to 550 degrees C. The deposited ZnO films on the ZnO-coated seed surfaces are preferentially on the (0 0 2) plane and exhibit increased from several 10 nm to 150 nm with increasing seed layer grain size. (C) 2008 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.jallcom.2008.08.080 http://hdl.handle.net/11536/7242 |
ISSN: | 0925-8388 |
DOI: | 10.1016/j.jallcom.2008.08.080 |
期刊: | JOURNAL OF ALLOYS AND COMPOUNDS |
Volume: | 475 |
Issue: | 1-2 |
起始頁: | L46 |
結束頁: | L49 |
Appears in Collections: | Articles |
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