表面輪廓儀用撓折式掃描平台之設計

Abstract

本論文為設計一個符合表面輪廓儀 (Surface profilometer) 使用的掃描平台，利用撓性結構優良的機械性質完成導引機構的設計，同時經由ANSYS模擬分析驗證設計可行性，最後結合表面輪廓儀進行量測，量測全行程為1 mm，且掃描100 nm階高樣品時，階高重複性達0.91 nm，使本設計之掃描平台成功應用於表面輪廓儀。

The purpose of this thesis is to design a scanner for profilometer. We use flexure mechanism to complete the guidance of stage and verify the feasibility of design by ANSYS software. Finally, we combine this scanner with commercial surface profilometer module. The stroke of the proposed scanner is 1 mm. The repeatability of 100 nm step height standard is 0.91 nm. The proposed design is used in surface profilometer successfully.