石英音叉鎢探針之設計與特性研究應用於表面形貌量測

Abstract

本論文研究一市售石英音叉（Quartz Tuning Fork, QTF）結合鎢探針（Tungsten Probe），構成了一個表面輪廓掃描感測器。該感測器，採用了與TM-AFM（Tapping Mode Atomic Force Microscope）相同的工作原理。接著將介紹此感測器的組成及特性，以證明此感測器的有效性，並可以應用於表面輪廓儀（Surface Profilometer）。

This paper presents a commercial quartz tuning fork (QTF) based homemade tungsten probe. The proposed QTF based tungsten probe can be used as a sensor in a surface profilometer, which has the same principle as a tapping-mode atomic force microscope. This study also discusses the characteristics of the proposed sensor and demonstrates its effectiveness.