石英音叉鎢探針之設計與特性研究應用於表面形貌量測

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	彭伯倫	en_US
dc.contributor.author	Peng, Bo-Lun	en_US
dc.contributor.author	洪紹剛	en_US
dc.contributor.author	Hung, Shao-Kang	en_US
dc.date.accessioned	2014-12-12T01:56:29Z	-
dc.date.available	2014-12-12T01:56:29Z	-
dc.date.issued	2011	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#GT079914563	en_US
dc.identifier.uri	http://hdl.handle.net/11536/49460	-
dc.description.abstract	本論文研究一市售石英音叉（Quartz Tuning Fork, QTF）結合鎢探針（Tungsten Probe），構成了一個表面輪廓掃描感測器。該感測器，採用了與TM-AFM（Tapping Mode Atomic Force Microscope）相同的工作原理。接著將介紹此感測器的組成及特性，以證明此感測器的有效性，並可以應用於表面輪廓儀（Surface Profilometer）。	zh_TW
dc.description.abstract	This paper presents a commercial quartz tuning fork (QTF) based homemade tungsten probe. The proposed QTF based tungsten probe can be used as a sensor in a surface profilometer, which has the same principle as a tapping-mode atomic force microscope. This study also discusses the characteristics of the proposed sensor and demonstrates its effectiveness.	en_US
dc.language.iso	zh_TW	en_US
dc.subject	石英音叉	zh_TW
dc.subject	鎢探針	zh_TW
dc.subject	表面輪廓儀	zh_TW
dc.subject	Quartz tuning fork	en_US
dc.subject	Tungsten probe	en_US
dc.subject	Profilometer	en_US
dc.title	石英音叉鎢探針之設計與特性研究應用於表面形貌量測	zh_TW
dc.title	Design and Characteristic Study of Quartz Tuning Fork Based Tungsten Probe for Surface Profiling	en_US
dc.type	Thesis	en_US
dc.contributor.department	機械工程學系	zh_TW
顯示於類別：	畢業論文