以粉末燒結法製作氧化鋯與鈦混體之微觀結構分析

Abstract

摘 要 本實驗利用TEM / EDS與XRD來鑑定ZrO2與Ti混體在Ar氣體的保護氣氛下，經過1300°C、1400°C與1500°C一小時燒結反應後之微觀結構。Sample條件以AT / BZ來表示，其中A為Ti在Sample中的原子百分比（at.%）；B為ZrO2(PSZ)在Sample中的原子百分比（at.%）。由TEM實驗結果顯示，在90T/10Z條件下經過1500°C熱處理，發現有α-Ti與c-ZrO2；在70T/30Z條件下經過1400°C熱處理，除了發現β□-Ti（orthorhombic）亦發現c-ZrO2。而從α-Ti matrix中所析出的Ti2ZrO（orthorhombic）分別在90T/10Z經過1400°C及1300°C熱處理、70T/30Z經過1500°C及1400°C熱處理與50T/50Z經過1400°C熱處理下被觀察到。在30T/70Z觀察到cubic TiO在α-Ti與t-ZrO2-x的晶粒間形成；10T/90Z則觀察到TiO與t-ZrO2-x。另外，在Sample 10T/90Z經過1500°C熱處理，藉由X-ray繞射分析可清楚看到有cubic ZrO生成，其space group為Fm m，a = 4.602 Å。

Abstract Sintering 3 mol. % Y2O3-ZrO2 was reacted with titanium at temperatures ranging from 1300°C to 1500°C for 1 hour in argon atmosphere. The Microstructure of the reaction was characterized by transmission electron microscopy (TEM) and X-ray diffraction (XRD). With different atomic percent of titanium and zirconia in samples, it was expressed as AT / BZ (A mean the atomic percent of titanium; B mean the atomic percent of zirconia). TEM analysis confirmed the α-Ti and c-ZrO2 in sample 90T/10Z at 1500°C; c-ZrO2 and β□-Ti (orthorhombic) were present in sample 70T/30Z at 1400°C. Ti2ZrO (orthorhombic) was precipitated from α-Ti in samples 90T/10Z, 70T/30Z and 50T/50Z at 1400°C and 1300°C, 1500°C and 1400°C, and 1400°C, respectively. TEM analysis show that cubic TiO particle was located between α-Ti and t-ZrO2-x grains in sample 30T/70Z; cubic TiO and t-ZrO2-x were also present in sample 10T/90Z. For sample 10T/90Z in 1500°C, cubic ZrO was identified by XRD and the lattice parameter of cubic ZrO was 4.602 Å, space was Fm m.