針對光學成像系統不同應用之相位片之分析與設計

Abstract

在本論文中，我們首先提出一個環狀對稱之相位型濾波片的設計，用於緩和三階與五階球差對系統成像品質所造成之影響。接續以上的概念，我們進一步將此設計延伸至同時考量雙波長的情況下，改善系統對球差的容忍度。藉由使用所設計的濾波片，光學系統對球差的容忍度已明顯地提高，但相對而言將使調制轉換函數產生惡化。接著，我們提出一個具有四個環帶的濾波片之設計，用於使光學系統在兩個不同的波長下，能同時達到超越繞射極限的效果。最後，我們對此論文做了一個簡要的總結。

In this thesis, we first present a radially symmetric phase-only filter to help alleviate the effects caused by the fluctuation of the third- and fifth-order spherical aberrations simultaneously. Furthermore, this idea is extended to the design of considering the system tolerance to spherical aberrations for dual wavelengths at the same time. It has been detailed that the use of the proposed phase filter indeed enhances the system tolerance to spherical aberrations, but causes a reduction in intensity and the MTF, as a tradeoff. Next, we present a method of designing a rotationally symmetric superresolving four-zone plate for dual wavelengths. The system performance of the design is shown in this thesis, with discussions in details. In the end, we draw the conclusions.