完整後設資料紀錄
DC 欄位語言
dc.contributor.author邱志文en_US
dc.contributor.authorChiou, Chie-Wunen_US
dc.contributor.author巫木誠en_US
dc.contributor.authorWu, Muh-Cherngen_US
dc.date.accessioned2014-12-12T02:48:14Z-
dc.date.available2014-12-12T02:48:14Z-
dc.date.issued2008en_US
dc.identifier.urihttp://140.113.39.130/cdrfb3/record/nctu/#GT009233809en_US
dc.identifier.urihttp://hdl.handle.net/11536/77140-
dc.description.abstract中文摘要 本論文主要研究在半導體新產品/新製程的情境下,傳輸整合步進機的排程問題。傳輸整合步進機通常是半導體工廠中的瓶頸機台,它的內部結構是由一連串的反應室所組成,而其對外連接了一個有限埠(port)存放區。在傳輸整合步進機內部反應室的加工與傳輸單位為晶片,而其外部埠的傳輸單位為一生產批量(最大可包含 25 片晶片)。因為傳輸單位的不一致,導致傳輸整合步進機的產能損失,特別是會發生在新產品/新製程導入情境下。在此情境下機台需要生產許多小批量(低於每批 25 片晶片),而這種產能損失可以透過有效的工件排程降低其損失。 本研究主要分成三個部分,第一部分在單部步進機的情境下,發展一個基因演算法求解其工件排程問題。第二部分為了得到更好的解題品質,發展新的演算法:GA-Tabu。第三部分探討在多機情境下,求解工件排程問題,在此情境下產生兩個決策變數:工件指派給各機台,以及工件在機台內的排序問題;為了解決此問題,本研究透過新的染色體設計,能同時代表此兩個決策變數,使得解題空間變小,求得更好的解題品質。 經過實例驗證顯示本研究新創的 GA-Tabu 演算法均超越過去文獻發展的演算法。 關鍵詞:排程、半導體、流程式生產、埠區限制、基因演算法、禁忌搜尋法zh_TW
dc.description.abstractAbstract This dissertation examines job scheduling problems for in-line steppers operating in a new process/production introduction (NPI) scenario. An in-line stepper is a bottleneck machine in a semiconductor fab. Its interior is comprised of a series of chambers, while its exterior is a dock equipped with a limited number of ports. The transportation unit for each chamber is a piece of wafer while that for each port is a job that could contain up to 25 wafers. This transportation incompatibility may lead to an unexpected capacity loss for an in-line stepper—in particular in an NPI scenario that, by nature, includes a substantial number of small-sized jobs. Such a capacity loss can be alleviated by effective scheduling. This dissertation is composed of three parts. Firstly, we develop a genetic algorithm (GA), a kind of meta-heuristic algorithm, to solve the job scheduling problem for a single in-line stepper. Secondly, to enhance the solution quality, we develop some other meta-heuristic algorithms. Thirdly, we examine a job scheduling problem, in which jobs could be processed by multiple in-line steppers. This problem includes two decisions: job assignment and job sequencing. Through developing a new and concise representation scheme for modeling the two decisions, we solve the multiple-machine scheduling problem by various meta-heuristic algorithms. The preceding single-machine scheduling problem in fact is a special case of the multiple-machine scheduling problem. Extensive numerical experiments indicate that a GA-Tabu algorithm developed by us essentially outperforms the other meta-heuristic algorithms adopted from literature. Keywords: Semiconductor, In-line stepper, Scheduling, GA-Tabu, Flow shop, Port constraint, GAen_US
dc.language.isozh_TWen_US
dc.subject排程zh_TW
dc.subject半導體zh_TW
dc.subject流程式生產zh_TW
dc.subject埠區限制zh_TW
dc.subject傳輸整合步進機zh_TW
dc.subjectSchedulingen_US
dc.subjectsemiconductoren_US
dc.subjectflowshopen_US
dc.subjectport contrainten_US
dc.subjectIn-line stepperen_US
dc.title半導體傳輸整合步進機在新產品/新製程導入情境下之排程zh_TW
dc.titleScheduling Semiconductor In-line Steppers in New Product/Process Introduction Scenariosen_US
dc.typeThesisen_US
dc.contributor.department工業工程與管理系所zh_TW
顯示於類別:畢業論文