氯氣氣瓶櫃洩漏危害分析與改善研究

Abstract

氯氣氣體的使用在半導體製程中一直扮演著重要的角色，特別是半導體製程目前已被廣泛的應用於各項產業，凡舉傳統的ULSI、TFT-LCD到現在開始萌芽的微機電(MEMS)產業，皆以所謂的半導體製程為產品的製造流程，其中的蝕刻製程即使用到相當多的氯氣氣體。而氯氣供應系統是半導體廠中危險性最高的一環，由於氯氣具有強烈的劇毒/腐蝕性，任何些微的洩漏都可能造成人員生命的危害，也就是因為這些顯而易見的危險，所以對於氯氣供應系統設計安全性及相關作業操作的要求就特別高。 本研究的目的是以氯氣供應系統運作的角度，去建立系統設置及作業時應注意或遵守的設計屬性與規範，並建立氯氣供應系統危害分析參考指標，藉此降低氯氣洩漏風險的適當控制。本研究以半導體廠為例，從氯氣供應系統以往所發生洩漏的問題點，包括鋼瓶儲存、搬運、更換及氣瓶櫃設置維修等全部包含其中，利用失誤模式與影響分析(Failure Modes and Effects Analysis, FMEA)、失誤樹分析(Fault Tree Analysis, FTA)等分析問題點，以追蹤因人為操作或設備故障所導致洩漏的問題點，並藉此建立人員作業標準程序及系統設置時的檢核表作為避免問題點重複發生的預防機制，進而增加氯氣供應系統的穩定性、提升人員作業的安全性、提高供應氣體的品質、減少意外洩漏發生機率。

The usage of chlorine gas plays a major role in semiconductor production industry. Today, as semiconductor-enabled technology is applied to many industries extensively, semiconductor production technology is commonly used not only in ULSI (Ultra Large Scale Integration) and TFT-LCD display industries, but also in modern MEMS (Micro-Electro-Mechanical Systems) industry. A tremendous amount of chlorine gas is used in semiconductor manufacturing, especially during the etching procedure. Providing chlorine gas during the semiconductor production process is one of the most dangerous steps, because chlorine gas is a strong poison and very corrosive. A small amount of chlorine gas leakage can be seriously harmful to human body, and for this reason it is very critical to design a highly secure chlorine supply system that can be operated safely. The purpose of this research is to build a reliable chlorine supply system by analyzing the current system in the semiconductor industry. In order to build a chlorine supply system that will meet all the expectations of safety, the system set-up and system operation are the essential elements of the design. Analyzing the current system from a wider perspective can provide useful guidance for determining safety regulations and personnel training. In addition, analyzing system specifications can increase the reliability and decrease the possibility of accidents. Studying the previous system issues and leakage problems can also help to identify human errors and hardware failures in order to avoid repeating the same mistakes in the system. Discovering the root problem associated with different procedures, such as gas storage, moving, renewal, and equipment maintenance is more accurate and effective by using FMEA (Failure Modes and Effects Analysis) and FTA (Fault Tree Analysis, FTA) techniques. This research provides beneficial information in order to set up a chlorine supply system, to follow the operational steps, to prevent repeated errors, improve dependability, to increase the production quality, and to prevent disastrous leakage.