矽甲烷槽車供應安全評估

Abstract

矽甲烷(SiH4)氣體近年來廣泛的應用在半導體、光電及太陽能產業，是這些產業的製程中相當重要的生產原料。然而，矽甲烷氣體具有與空氣接觸會自燃、易爆等特性，並且燃燒時會釋放出未結晶的二氧化矽濃煙。若製程進行時或運送過程中發生洩漏或防護失效等情形，除了可能導致環境污染外，更會損壞光半廠中昂貴的設備，嚴重時可能造成人員傷亡或火災爆炸，是不可忽視的重要議題。TFT-LCD廠的矽甲烷使用量是半導體廠的倍數，因此TFT-LCD廠的矽甲烷氣體槽車的安全評估為相當重要的環節。 本論文以矽甲烷自燃濃度是否超過最低爆炸濃度以及是否低於臨界流速，做為矽甲烷氣體槽車安全設計之考量。並且本論文分析了槽車置放環境的狀況，並評估了在不同置放環境下的安全性。本研究並評估了矽甲烷槽車作業的安全性，並分析了槽車作業防災策略、槽車安全設計與管理以及槽車置放與裝載，對於矽甲烷的槽車供應的安全評估做出極為詳盡的評估與分析。

In recent years, silane (SiH4) gas is one of important raw materials for semiconductor, electro-optical, and solar energy industries. However, the silane gas ignites spontaneously when exposed to air and explosive easily. It also releases the smoke of uncrystallized silica when it ignites. When leakage or protection failure occurs during the delivery process, it will damage the facilitles of factory , and leads to the environmental pollution. It may also cause the injuries or fire explosion in severe cases. The usage of silane in TFT-LCD factory is for more than that in semiconductor factory, therefore it is a important issue to evaluate the safety of silane gas trailer.

This thesis studies the safety of silane gas trailer by the cases of whether the spontaneous combustion concentration of silane is more than minimum explosive concentration and lower than critical flow velocity. The condition of parking environment of trailer and the security in the different parking environments are also evaluated. This study also investigates the operation security of silane trailer and analyzes the strategy of disaster prevention of operation, the safety management devise and parking and loading of trailer.