仿酢漿草結構為感測振膜之高性能音源定位麥克風的設計與製作

Abstract

科學家發現中文學名為奧米亞棕□的聽覺器官可經由一種獨特的橋型結構將振膜相互連接來定位出微小的聲音梯度。在此篇論文中，我們利用中央平衡環支撐式圓形結構並且模仿酢漿草的結構，提出了一個全新發展的微機械仿生物式麥克風。這種仿酢漿草的振膜能夠經由減少感測振膜之間的交互影響來改善其位移量，並且能夠利用中央平衡環結構的最佳化設計來提升音源定位的能力。此外，相較於中央平衡環支撐式圓形振膜的設計，仿酢漿草的設計可提供3.7倍大的淨位移量，而且，仿酢漿草的振膜能表現出小於10度的空間分辨率。文中所有的設計與模擬是利用有限元素分析法的模擬軟體ANSYS來完成的。最後利用標準的MUMPs ( Multi-User MEMS Precesses )製程以及表面微加工技術製作出單一晶片的仿生物式麥克風。

Researchers found the Ormia Ochracea’s auditory organ can locate a small sound gradient via a unique intertympanal bridge structure. In this thesis, we propose a newly developed micromachined biomimetic microphone by utilizing the central gimbals-support circular structure [5-8], and mimicking the structure of the oxalis. The oxalis-like diaphragm can not only improve the displacement by decoupling the sensing diaphragm but also enhance the capability of sound source localization with the optimum design of the central gimbals structure. Moreover, the net displacement of the diaphragm with the oxalis-like design has 3.7 times larger than that of the diaphragm with the central gimbals-support circular diaphragm design, and the oxalis-like diaphragm performs the spatial resolution with opening angle smaller than 10 degrees. The design and FEM simulation are analyzed by ANSYS simulator. The process of the single-wafer biomimetic microphone is fabricated by the standard Multi-User MEMS Processes (MUMPs) with three poly-silicon layers and two sacrificial layers.