積體光電子模組中光波連結與元件整合之研究

Abstract

本文提出一矽基板光電子單晶片構裝模組。該模組中包括光子晶體波導元件、平面漸變光波導、平面彎曲波導與平面光波導分光元件等關鍵元件的光學與物理特性，並針對該模組中光電子整合的技術進行分析與討論。就光子晶體波導與傳統平面光波導耦合的技術，本文提出了藉由軸向的光模匹配理論能更大幅增加光子晶體波導與傳統平面光波導之間的耦合效率(從30%到86%)。此外，為了更有效利用矽基板中光波傳導密度，本文提出了使用積體光學中微透鏡組來設計高效率小體積之平面漸變光波導、平面彎曲波導與平面光波導分光元件等關鍵元件。最後，本文提租兩種矽基光電平台為基礎的元件，包括光通訊系統中平面光收發器與光讀寫頭應用之雙波長雷射模組來展示矽基板光電子單晶片構裝模組中光電子整合與光波信號水平與垂直傳遞之技術。

In this study, a concept of silicon-based photonic-system-on-package (PSOP) modules is presented. Key components of PSOP modules such as photonic crystal (PhC) integrated circuits, conventional slab waveguides, and photonic/electronic integration are discussed and analyzed in this dissertation. By shifting the waveguide junction longitudinally, the coupling efficiency between PhC and conventional silica waveguides can be increased from 30% to 86% readily. In order to make good use of the silicon substrate in a PSOP module, the guided-wave lenses are employed to design ultra-compact waveguide tapers, bends, and splitters with wide bandwidth and low insertion losses. Two integrated optical modules, transmitter/receiver optical subassemblies and two-wavelength laser modules, using the silicon optical bench technology are presented to demonstrate photonic-electronic integration of the proposed PSOP modules.