熱處理溫度對浸漬法製備氧化銦錫薄膜之影響

Abstract

氧化銦錫是ㄧ種透明導電的材料，由於它的高導電性(120 ohm/square)和高透光率(90%)的特殊性質，所以被廣泛的利用在平面顯示器與太陽能電池上；在這篇論文中，我們將利用浸漬法(Dip Coating Process)和熱處理來製作ITO導電玻璃，實驗目的在於改變熱處理溫度和氣氛觀察對ITO導電玻璃的影響並且對於量測結果加以分析討論。

實驗將用四點探針量測其片電阻，利用Hall量測儀測量其載子濃度與遷移率，光譜儀測量其透光率與反射率，XRD與SEM量測薄膜厚度、晶粒大小和晶粒的優選方向。實驗結果顯示隨熱處理溫度越高其片電阻越低，熱處理氣氛中添加還原氣體可以降低其片電阻；最低的片電阻到達120Ω/□，已經到達商業用途(觸控面板)的要求。

Indium tin oxide (ITO) is an important transparent conducting material, especially as transparent electrodes of flat panel display (FPD) including solar cells and touch panels. In this study, we use ITO nano-partical in ethanol solution to prepare the thin film used by dip coating process on quartz glasses. Heat treatment temperature was changed and three different atmospheres were blowing over the ITO thin film during thirty minutes in order to know the relationship between heat treatment conditions and films properties.

The heat treatment temperature made the grain size and grain orientation changes. The different atmosphere made different electrical property. We investigated that good film structure and surface morphology decreased the sheet resistance. The optical transmittance was more than 85% in the visible range and the lowest sheet resistance is 120Ω/□. These qualities already reached to the order of touch panel in the industry.