利用鈦金屬將氧化鋯接合之微觀結構分析

Abstract

本實驗在氬氣為保護氣氛下，以鈦箔(30μm)接合ZrO2，接合時間、溫度為1100℃/36hr~1500℃/36hr。反應後利用掃描式電子顯微鏡(SEM/BEI)、電子微探儀(EPMA)、電子顯微鏡(TEM/EDS)來鑑定ZrO2與鈦箔之介面反應與鈦箔本身的氧化行為。實驗結果顯示，1400℃/36hr與1500℃/36hr反應後，鈦層出現許多孔洞與裂縫，接合效果較差。在鈦箔與氧化鋯之反應中，鈦本身的氧化行為較為顯著，Zr與Ti之交互擴散狀況不明顯。在1100℃/36hr反應後，鈦側經TEM鑑定為α-Ti固溶氧，而氧化鋯側為tetragonal相之ZrO2-x。1200℃/36hr與1300℃/36hr反應後，在鈦側發現針狀之Ti2O3與TiO；氧化鋯側在1300℃/36hr反應後出現許多TiO於晶粒間析出，且觀察到c-ZrO2-x與t-ZrO2-x；1200℃/36hr反應後於氧化鋯側則只發現t-ZrO2-x。1400℃/36hr反應後在鈦側發現TiO，而氧化鋯側則出現t-ZrO2-x。

The objective of this work is to joint ZrO2 to itself using Ti foil. The reaction was at the temperature from 1100℃ to 1500℃ in the atmosphere of argon. The microstructure of the reaction interface were characterized by scanning electron microscopy(SEM)、electron probe microanalyzer (EPMA) and analytical transmission electron microscopy(TEM/EDS). After annealing at 1100℃/36h, the dissolution of a large amount of oxygen into titanium gave rise to α-Ti(O) solid solution. At temperature above 1200℃，the oxygen transport through the interface resulting in the growth of titanium oxide, TiO and Ti2O3.In the zirconia side, t-ZrO2 was found after 1100℃/36h-1400℃/36h annealing, and c-ZrO2 was also found after annealing at 1300℃/36h.