标题: | 利用统计方法自动依工程忍受度判断机台差异及其在半导体制程改善之应用 A New Statistical Method for Automatic Partitioning Tools According to Engineers’ Tolerance Control in Process Improvement |
作者: | 涂凯文 Kai-Wen Tu 卢鸿兴 Horng-Shing Lu 统计学研究所 |
关键字: | 贝氏分析;资料探勘;RJMCMC;CART;量率提升;制程能力指标;APC;Bayesian fit;data mining;reversible jump Markov chain Monte Carlo;CART;yield enhancement;process capability;APC |
公开日期: | 2007 |
摘要: | 在半导体产业, 机台表现之比较是提升量率的关键之一, 我们发展一套新的统计方法, TCP.不但可以适用在机台使用率不相同造成之样本数不同之现象亦可主动依工程师设定之工程忍受度将机台分群,可大幅缩短工程师分析机台表现之时间,我们将提供统计模拟来说明我们方法之优点也提供两个半导体业界之实例说明我们的方法可适用在量率提升与制程能力提升 In the semiconductor industry, tool comparison is a key task in the yield and the product quality enhancements. We developed a new method, called tolerance control partitioning (TCP), to automatically partition tools into several homogenous groups based on the related metrology results. This methodology is based on a hierarchical normal model and the implementation is carried out using a Bayesian approach. There are several advantages of using the TCP method. First, it takes into account the unbalanced usage of the tools in the manufacturing processes. Moreover, the “engineer’s tolerance control” can be incorporated into the TCP method via the specification of the priors in the Bayesian analysis, which justifies the significant difference between groups according to the experts’ knowledge. This specification not only has the advantage of adjusting the number of partition groups but also avoids the problem of having too many partition groups with small differences which is often encountered in the conventional approaches. Some simulation results illustrate the advantages of the TCP method compared to the method of classification and regression trees (CART). Moreover, the TCP method is applied to two real examples for the yield and Cp/Cpk enhancement in the semiconductor industry. Both results confirm the practical usefulness of the proposed method. For general applications, the TCP method is also useful for other similar problems such as the comparisons between several experimental recipes or the comparisons between different materials. |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#GT009326802 http://hdl.handle.net/11536/79304 |
显示于类别: | Thesis |
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