生物分子於矽基礎結構之選擇性組裝

Abstract

近年來，跨領域的奈米科技發展的非常蓬勃，其中重要的應用之ㄧ便是結合半導體產業以及生物科技所產生的生物感測器。生物感測器首先必須將生物分子固定至半導體元件表面，然後靈敏且專一的偵測目標分子。本論文主要在於研究如何選擇性的將生物分子組裝固定到以矽為相關材料的結構上面。 我們首先將表面以APTES以及戊二醛修飾，固定化螢光分子到不同的基材上，挑選出最合適於固定化的基材。之後我們成功的將具有活性的酵素sulfotransferase固定化至二氧化矽上，而固定化後的sulfotransferase依然能夠保持原來的活性。 我們將固定化技術應用到一個嶄新的奈米線材料金矽化物上面。一開始先以電子束微影技術以及濕式蝕刻的方法，製作出多晶矽奈米線。接著在表面沉積金元素並進行退火，將多晶矽奈米線轉變成金矽化物奈米線。利用王水將未反應的金蝕刻掉之後，金矽化物奈米線以1,2-ethanedithiol以及SulfoSMCC作表面的修飾，最後固定上各種不同的生物分子。利用螢光或是電性量測的結果，可以證明金矽化物奈米線是一個良好的生物分子感測元件。

In recent years, the interdisciplinary Nanotechnology booms very quickly. Biosensor is one of the applications of nanotechnology that combines the semiconductor industry and biotechnology. Biosensor must assemble biomolecules onto the surface of semiconductor devices and have high sensitivity and specificity to the target. In this thesis, my study is to selectively assemble biomolecules onto the silicon-based structures. At first, the surface of various substrates was modified by APTES and glutaraldehyde, and the fluorescent molecules were immobilized onto them. We choose the suitable substrate for immobilization. Thereafter, we immobilize the active enzyme sulfotransferase onto the silicon dioxide, and the enzyme still has origin activity after immobilization. We propose a novel material gold-silicide to form one-dimensional nanowire for the application of the immobilization technique. We fabricated the poly-silicon nanowire through direct e-beam writing and wet-etching. After depositing a thin gold film by using a sputtering system, we annealed the poly-silicon nanowire to form the gold-silicide nanowire. The resulting wafers were immersed in the aqua regia to remove the unreacted gold. After surface modification by 1,2-ethanedithiol and SulfoSMCC, the various biomolecules are immobilized onto the gold-silicide nanowire. The results of fluorescent images and electrical properties can approve the gold-silicide nanowire is an excellent device for biomolecular detection.