類鑽碳膜離子束配向特性研究

Abstract

在一般傳統的液晶顯示面板的製造過程中，配向製程是將聚亞醯胺薄膜經過纖維絨毛高速刷磨後，使液晶沿著刷磨方向進行排列而形成均勻的配向，但此以纖維絨毛刷磨的製程方式會有刷痕、微粒、靜電及於大面積時有不均勻的缺點。為消除此傳統製程上的缺點及提升液晶顯示器產品的製程品質，因此本論文嘗試以非接觸式的離子束配向技術，探討配向製程應用可能性之討論，以類鑽碳膜做為液晶顯示器內的配向膜，並且以氬離子束進行配向試驗，組成液晶顯示元件，並進行電性特性測試與量測。經實驗結果顯示，以類鑽碳-離子配向之液晶顯示面板之電壓維持率大於97%，殘留直流電壓小於500mV，錨定能大於1.0×10-5 J/m2，皆符合液晶顯示面板電性特性上之需求。藉此證明類鑽碳-離子束配向技術是一項可取代一般傳統所使用的聚亞醯胺-機械定向刷磨技術，同時可使液晶顯示器能得到較好顯示品質能力的製造技術。

In the conventional process of LCD panel fabrication, the alignment layer（Polyimide）was usually made by rubbing method, however, there were some drawbacks of this procedure including scratches, debris and ESD. The study is the alignment layer made of diamond-like carbon by the non-contact-type ion beam alignment technology in order to improve the quality of LCD product.According to these results, it is apparent that the voltage holding ratio higher than 97%, the residual direct current lower than 500mV and the anchoring energy higher than 1.0×10-5 J/m2 were obtained when the alignment layer made by the ion beam alignment technology. In contrast with traditional PI-rubbing technology, the DLC-IBA technology is a remarkable method to obtain better quality and higher yield of product. Key word：ion beam alignment, diamond-like carbon.