某晶圓廠區域洗滌設備異常事件之風險評估

Abstract

高科技產業一直被視為台灣經濟龍頭的產業，半導體產業更是當前的經濟發展重要指標，並被行政院列為兩兆雙星產業之一(半導體及光電業)，根據經濟部工業局估計，台灣半導體在2008年總產值可達到1.7兆元，可望再創新高。然環保意識抬頭，半導體製程所衍生的廢氣廢液等問題，在全球暖化的今天，引起了高度重視。製程尾氣處理設備 (Local Scrubber)，已是當今處理製程廢氣的重要一環，以往許多研究均是探討其處理的效率問題，並未著墨於其本身機台的風險危害評估。

有鑑於此，本研究將以國內某半導體晶圓廠區域洗滌設備之異常事故為樣本，審視其本體之安全設計及消除降低危害之情況，進行初步的危害評估，鑑認出各單元之相對的危害等級，發現區域洗滌設備元件及管路的部分，確實具有較高之危害風險。針對此高潛在的危害設施，以HazOp (Hazard And Operation Study)分析法評估危害原因並著重改善對策的議題加以探討，並提出工程控制的改善方案。

最後根據改善後當年與未改善前一年之異常事件做比較，檢視其結果，發現確實有效降低系統風險危害的等級。此方法將可提供後續擴廠的借鏡與方針，以提供此區作業人員安全的工作環境。

High-tech industry has been viewed as the lead industry in Taiwan. The semiconductor industry is also an indicator of current economic development and is listed as “Two Trillion and Twin Star Industries Development Plan” by Executive Yuan. The output value of the semiconductor industry in Taiwan is estimated to 1.7 trillions and will hit the all-time high in 2008. However, the environment protection has been awakened and the problem on flare gas or waste liquid derived from the production process of semi-conductor has been taken seriously along with the issue on global warming. The local scrubber equipment is one of the important parts of the production process. There have been many researches on the processing efficiency other than the risk assessment of the local scrubber equipment.

Accordingly, this research is sampling on the abnormal events of local scrubber in some foundry to examine the safe design of the equipment and to reduce the condition of the damage. We made the initial evaluation with regard to the damage and found out the relative degree of the damage for each unit. The result showed that the identity of the local scrubber and its piping were under relative high risk of damage. For high potential risk of damage, we used “Hazard And Operation Study” to analyze the damage factors and focus on the issue on improvement, especially on action plan of engineering control. Finally, we compared the abnormal events occurred during the year when the action plan is implemented with last year when no action plan was carried out. Then it was resulted that action plan was actually efficiently reduced the degree of the damage for the system risk. This method can be carried into effect for further expansion and to provide a safe environment for the operators.