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dc.contributor.authorLi, Zhen-Yuen_US
dc.contributor.authorLo, Ming-Huaen_US
dc.contributor.authorHung, C. T.en_US
dc.contributor.authorChen, Shih-Weien_US
dc.contributor.authorLu, Tien-Changen_US
dc.contributor.authorKuo, Hao-Chungen_US
dc.contributor.authorWang, Shing-Chungen_US
dc.date.accessioned2014-12-08T15:10:54Z-
dc.date.available2014-12-08T15:10:54Z-
dc.date.issued2008-09-29en_US
dc.identifier.issn0003-6951en_US
dc.identifier.urihttp://dx.doi.org/10.1063/1.2996566en_US
dc.identifier.urihttp://hdl.handle.net/11536/8339-
dc.description.abstractLow dislocation density ultraviolet (UV) AlGaN/GaN multiple quantum well (MQW) structure was grown using atomic layer deposition (ALD) technique. The AlGaN/GaN MQW grown on the sapphire substrate consisted of three GaN QWs and four AlGaN barriers formed by ALD grown AlN/GaN superlattices. The as-grown sample showed smooth surface morphology with a root-mean-square roughness value of only 0.35 nm, and no surface cracks were found. The dislocation density was estimated to be as low as 3.5 x 10(7) cm(-2). X-ray and transmission electron microscope data showed the MQW had sharp interfaces with good periodicity. The sample had an UV photoluminescence emission at 334 nm (3.71 eV) with a very narrow linewidth of 47 meV at 13 K. The cathodoluminescence image revealed a fairly uniform luminescence pattern at room temperature. The AlGaN/GaN MQW grown by ALD technique should be useful for providing high crystalline quality for fabrication of various optical devices. c 2008 American Institute of Physics.en_US
dc.language.isoen_USen_US
dc.titleHigh quality ultraviolet AlGaN/GaN multiple quantum wells with atomic layer deposition grown AlGaN barriersen_US
dc.typeArticleen_US
dc.identifier.doi10.1063/1.2996566en_US
dc.identifier.journalAPPLIED PHYSICS LETTERSen_US
dc.citation.volume93en_US
dc.citation.issue13en_US
dc.citation.epageen_US
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:000259794100016-
dc.citation.woscount4-
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