標題: | Development of novel cascade structure for improving stroke of electrostatic comb-drive actuator |
作者: | Chiou, J. C. Kuo, C. F. Lin, Y. J. Chang, C. W. Hou, K. C. 交大名義發表 National Chiao Tung University |
公開日期: | 2008 |
摘要: | In this study, a novel cascade structure for improving the stroke of electrostatic comb-drive actuator is proposed. With the cascade configuration, the stroke can be improving efficiency. The proposed actuators were fabricated through CMOS processes and post-CMOS micromachining steps. Experimental results indicated that the stroke of the lateral and vertical cascade electrostatic comb-drive actuators can be improved 180% and 188% respectively without adding extra driving voltage. These results demonstrated that the proposed cascade configurations have the capability to improve the actuation stroke of electrostatic actuators. |
URI: | http://hdl.handle.net/11536/885 |
ISBN: | 978-1-4244-1792-6 |
ISSN: | 1084-6999 |
期刊: | MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST |
起始頁: | 471 |
結束頁: | 474 |
Appears in Collections: | Conferences Paper |