建立模擬非晶形矽薄膜沉積的化學動力學資料庫( III )

Full metadata record

DC Field	Value	Language
dc.contributor.author	林明璋	en_US
dc.contributor.author	LIN MING CHANG	en_US
dc.date.accessioned	2014-12-13T10:31:05Z	-
dc.date.available	2014-12-13T10:31:05Z	-
dc.date.issued	2013	en_US
dc.identifier.govdoc	NSC102-2113-M009-002	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/90705	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=3169947&docId=426488	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	建立模擬非晶形矽薄膜沉積的化學動力學資料庫( III )	zh_TW
dc.title	Chemical Kinetics Database for Simulations of A-Si:H Thin Film Growth (III)	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學應用化學系（所）	zh_TW
Appears in Collections:	Research Plans