ALD 在 Damascene 銅製程應用之研究(II)

Full metadata record

DC Field	Value	Language
dc.contributor.author	陳智	en_US
dc.contributor.author	Chen Chih	en_US
dc.date.accessioned	2014-12-13T10:31:22Z	-
dc.date.available	2014-12-13T10:31:22Z	-
dc.date.issued	2004	en_US
dc.identifier.govdoc	NSC93-2623-7009-003	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/90888	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=911995&docId=172348	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	ALD 在 Damascene 銅製程應用之研究(II)	zh_TW
dc.title	The Application of ALD on Damascene Cu Metallization(II)	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學材料科學與工程系	zh_TW
Appears in Collections:	Research Plans

Files in This Item:

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.