Full metadata record
DC FieldValueLanguage
dc.contributor.author葉清發en_US
dc.date.accessioned2014-12-13T10:31:48Z-
dc.date.available2014-12-13T10:31:48Z-
dc.date.issued2004en_US
dc.identifier.govdocNSC93-2215-E009-005zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/91157-
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=1026613&docId=195156en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.language.isozh_TWen_US
dc.title奈米世代MOSFET關鍵製程技術之研發(III)zh_TW
dc.titleKey Process Technology Research and Development of Nanometer Generation MOSFET(III)en_US
dc.typePlanen_US
dc.contributor.department交通大學電子工程系zh_TW
Appears in Collections:Research Plans