凹槽拖曳式分子幫浦之流場分析

標題:	凹槽拖曳式分子幫浦之流場分析 Flow Analysis in Grooved Molecular drag Pumps
作者:	崔燕勇國立交通大學機械工程學系
公開日期:	2000
官方說明文件#:	NSC89-2212-E009-077
URI:	http://hdl.handle.net/11536/91830 https://www.grb.gov.tw/search/planDetail?id=549684&docId=101494
Appears in Collections:	Research Plans

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