DESIGN OF A NON-POWERED MEMS HIGH G SHOCK SENSOR

Abstract

Conventional shock sensors typically use mechanisms such as cantilever beams or axial springs as triggering devices. Reaction time for these conventional shock sensors are either far too slow or, in many cases, fail to function completely for high G (> 300G) applications. In this study, a non-powered MEMS high G shock sensor with a measurement range of 3,000-21,000 G is presented. The triggering mechanism is a combination of cantilever and spring structure. The design of the mechanism underwent a series of analyses. Simulation and test results indicated that a MEMS high G shock sensor has a faster reaction time than conventional G shock sensors that use a cantilever beam or spring mechanism. Furthermore, the MEMS high G shock sensor is sufficiently robust to survive the impact encountered in high G application where most conventional G shock sensors fail.